Rapid thermal processing: volume 84
Éditeur :
Elsevier Science & Technology
ISBN :
9780080436128
Date de publication :
17 mars 1999
Dimensions :
27,9 x 21,0 cm
Poids :
580 g
Langue :
Anglais
Pays d'origine :
Grande Bretagne
Rapid Thermal Processing (RTP) is a well established single-wafer technology in USLI semiconductor manufacturing and electrical engineering, as well as in materials science. This work talks about Rapid Thermal Processing.