Materials and processes for submicron technologies: volume 89
Éditeur :
Elsevier Science & Technology
ISBN :
9780080436173
Date de publication :
3 nov. 1999
Dimensions :
27,9 x 21,0 cm
Poids :
570 g
Langue :
Anglais
Pays d'origine :
Grande Bretagne
The European Materials Society decided to hold a Symposium entitled Materials and Processes for Submicron Technologies in June 16-19, 1998, within the yearly E-MRS Spring Meeting in Strasbourg, France. This title presents the articles which represent the 40 papers accepted for this particular E-MRS Meeting (Symposium N).