Semiconductor manufacturing technology
Auteur :
Quirk, Michael
Éditeur :
Quirk, MichaelSerda, Julian,
ISBN :
9780130815200
Date de publication :
9 nov. 2000
Dimensions :
30,0 x 21,7 x 3,1 cm
Poids :
1510 g
Langue :
Anglais
Pays d'origine :
USA
An introduction to the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra-large-scale integrated semiconductors. The book provides technical information and strikes a balance between the process and equipment technology found in wafer fabrications.