Nanotechnology: integrated processing systems for ultra-precision and ultra-fine products
Éditeur :
Oxford University Press
ISBN :
9780198562832
Date de publication :
25 juil. 1996
Dimensions :
25,3 x 19,4 x 2,7 cm
Poids :
1005 g
Langue :
Anglais
Pays d'origine :
Grande Bretagne
The manufacture of integrated circuits and opto-electronic devices, for example, calls for accuracies in the nanometre range (approximately three atomic lattice spacings). This book examines the technology and systems needed to achieve this level of accuracy. It is written by the leading researchers in Japan, that is: the world leaders.