Plasma processing of materials: scientific opportunities and technological challenges
Auteur :
National Research Council / Division on Engineering and Physical Sciences / Commission on Physical Sciences, Mathematics, and Applications / Board on Physics and Astronomy / Plasma Science Committee / Panel on Plasma Processing of Materials
Éditeur :
National Academies Press
ISBN :
9780309045971
Date de publication :
1 janv. 1991
Dimensions :
27,9 x 21,6 cm
Langue :
Anglais
Pays d'origine :
USA
Describes the relationship between plasma processes and industrial applications, examines plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this field. This title recommends a coordinated, focused, and well-funded research program in this area.