Beam technologies for integrated processing
Auteur :
Committee on Beam Technologies: Opportunities in Attaining Fully Integrated Processing Systems / Committee on Beam Technologies: Opportunities in Attaining Fully Integrated Processing SystemsCommission on Engineering and Technical Systems,National Materials Advisory Board,Division on Engineering and Physical Sciences,National Research Council,National Academy of Sciences,
Éditeur :
National Academies Press
ISBN :
9780309046350
Date de publication :
1 janv. 1992
Dimensions :
28,0 x 21,6 cm
Langue :
Anglais
Pays d'origine :
USA
Beam technologies play an important role in microelectronic component fabrication. This volume identifies various beam technologies and their applications in electronics and other manufacturing processes. Recommendations for research and development to enhance the understanding, capabilities, and applications of beam technologies are presented.