Microelectromechanical systems: advanced materials and fabrication methods
Auteur :
National Research Council / Division on Engineering and Physical Sciences / National Materials Advisory Board / Commission on Engineering and Technical Systems / Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems
Éditeur :
National Academies Press
ISBN :
9780309059800
Date de publication :
1 déc. 1997
Dimensions :
27,9 x 21,6 cm
Langue :
Anglais
Pays d'origine :
USA
Microelectromenchanical systems (MEMS) is a field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. MEMS is a multidisciplinary field involving challenges and opportunities for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry.