Micromachined resonant devices: design of micromechanical devices
Auteur :
Hao, Zhili
Éditeur :
Hao, Zhili
ISBN :
9780387462790
Date de publication :
1 févr. 2009
Langue :
Anglais
Pays d'origine :
USA
Micromachined resonant devices are of great interest for a variety of applications. This title provides a description of the design, modeling, and simulation of micromachined resonant devices from basic structural components, integrated transducers, to electromechanical system-level models, including Optical MEMS, RF MEMS, and inertial sensing.