Multi-wafer rotating mems machines: turbines, generators, and engines
Éditeur :
Springer-Verlag New York Inc.
ISBN :
9780387777467
Date de publication :
30 sept. 2009
Dimensions :
23,5 x 15,5 cm
Langue :
Anglais
Pays d'origine :
USA
Describes the collaboration and research that was developed to produce the MIT Gas Turbine Engine. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. This book discusses the technical details that have gone into producing the engine and the overall systems-level.