Micro mechanical systems: principles and technology: volume 6
Éditeur :
Elsevier Science & Technology
ISBN :
9780444823632
Date de publication :
24 juil. 1998
Dimensions :
24,4 x 17,5 cm
Poids :
670 g
Langue :
Anglais
Pays d'origine :
Grande Bretagne
Divided into ten sections, this book describes the principles and technology of Micro Mechanical Systems. It also provides an introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems.