Fundamental principles of optical lithography: the science of microfabrication
Auteur :
Mack, Chris
Éditeur :
John Wiley & Sons Inc
ISBN :
9780470018934
Date de publication :
16 nov. 2007
Dimensions :
25,3 x 17,5 x 3,6 cm
Poids :
1162 g
Langue :
Anglais
Pays d'origine :
USA
Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.