Euv lithography
Auteur :
Bakshi, Vivek
Éditeur :
John Wiley & Sons Inc
ISBN :
9780470471555
Date de publication :
16 janv. 2009
Dimensions :
25,4 x 17,8 x 4,3 cm
Poids :
1542 g
Langue :
Anglais
Pays d'origine :
USA
EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.