Handbook for cleaning for semiconductor manufacturing: fundamentals and applications
Éditeur :
John Wiley & Sons Inc
ISBN :
9780470625958
Date de publication :
4 févr. 2011
Dimensions :
26,2 x 18,5 x 3,4 cm
Poids :
1202 g
Langue :
Anglais
Pays d'origine :
USA
This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation.