Fundamental principles of optical lithography: the science of microfabrication
Auteur :
Mack, Chris
Éditeur :
John Wiley & Sons Inc
ISBN :
9780470727300
Date de publication :
16 nov. 2007
Dimensions :
24,4 x 17,0 x 3,1 cm
Poids :
992 g
Langue :
Anglais
Pays d'origine :
USA
Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.