Digital holography for mems and microsystem metrology
Auteur :
Asundi, Anand
Éditeur :
John Wiley & Sons Inc
ISBN :
9780470978696
Date de publication :
28 juil. 2011
Dimensions :
24,1 x 16,3 x 1,9 cm
Poids :
499 g
Langue :
Anglais
Pays d'origine :
USA
By taking a practical approach to the industrial inspection of digital holography, Digital Holography for MEMS and Microsystem Metrology offers a description of the use of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation and device testing and inspection.