Vlsi fabrication principles: silicon and gallium arsenide

Auteur :
Ghandhi, Sorab K.
Éditeur :
John Wiley & Sons Inc
ISBN :
9780471580058
Date de publication :
22 avr. 1994
Dimensions :
24,0 x 16,4 x 4,4 cm
Poids :
1308 g
Langue :
Anglais
Pays d'origine :
USA
Integrating discussion of elemental (silicon) and compound (gallium arsenide) technologies, this monograph explains why the two materials are particularly suited to Very Large Scale Integrated (VLSI) schemes. The fabrication principles for circuits such as CMOS, MOS and PET are emphasized.