Ion-solid interactions: fundamentals and applications
Auteur :
Nastasi, Michael / Mayer, James / Hirvonen, James K.
Éditeur :
Cambridge University Press
ISBN :
9780521373760
Date de publication :
29 mars 1996
Dimensions :
22,9 x 15,2 x 3,7 cm
Poids :
1010 g
Langue :
Anglais
Pays d'origine :
Grande Bretagne
This book describes how materials, from semiconductors to tool steels, can be modified to create new materials. Its importance is that it is the first book in two decades to describe completely the implantation process which is used universally in semiconductor production.