Electrical characterization of silicon-on-insulator materials and devices
Auteur :
Cristoloveanu, Sorin
Éditeur :
Cristoloveanu, SorinLi, Sheng S.,
ISBN :
9780792395485
Date de publication :
1 juin 1995
Dimensions :
23,4 x 15,6 x 2,2 cm
Poids :
735 g
Format :
Laminated cover
Langue :
Anglais
Pays d'origine :
USA
Describes a variety of electrical characterization methods, from wafer screening and defect identification to detailed device evaluation. This book provides a comprehensive treatment of different aspects of SOI technologies, including material synthesis, device physics, characterization, circuit applications, and reliability issues.