Wafer fabrication: factory performance and analysis
Auteur :
Atherton, Linda F.
Éditeur :
Atherton, Linda F.Atherton, Robert W.,
ISBN :
9780792396192
Date de publication :
1 nov. 1995
Dimensions :
23,4 x 15,6 x 2,6 cm
Poids :
862 g
Format :
Laminated cover
Langue :
Anglais
Pays d'origine :
USA
Understanding the details of wafer fabrication processes and the related aspects of electronic devices can be an overwhelming task in the absence of a systematic, comprehensive view of the technology. This book presents a treatment of both the technology of wafer fabrication and the factories where it occurs.