Laser applications in microelectronic and optoelectronic manufacturing iii
Auteur :
Dubowski, Jan J.
ISBN :
9780819427137
Date de publication :
31 juil. 1998
Langue :
Anglais
Pays d'origine :
USA
The 37 papers collected in this text examine aspects of laser applications in microelectronic and optoelectronic manufacturing. Topics discussed include processes and diagnostics of laser ablation, methods and tools for laser microfabrication and defect correction.