Advances in resist technology and processing xv
Auteur :
Conley, Willard
ISBN :
9780819427786
Date de publication :
31 juil. 1998
Langue :
Anglais
Pays d'origine :
USA
A review of advances in resist technology and processing. It contains 142 papers which cover areas such as ArF materials, DUV processing and Novolak-based processing.