Photomask and x-ray mask technology v
Auteur :
Aizaki, Naoaki
ISBN :
9780819428646
Date de publication :
31 oct. 1998
Langue :
Anglais
Pays d'origine :
USA
An overview of photomask and X-ray mask technology. The papers are divided into sections which explore topics such as: device trends; equipment; X-ray masks; and advanced mask fabrication processes.