Microelectronic device technology ii
Auteur :
Burnett, David
ISBN :
9780819429650
Date de publication :
31 oct. 1998
Langue :
Anglais
Pays d'origine :
USA
A collection of 40 papers on microelectronic device technology. It addresses: dielectrics/gate technology; source/drain junctions and salicide; integration and manufacturability; and other issues.