Process, equipment, and materials control in integrated circuit manufacturing iv
Auteur :
Toprac, Anthony J.
ISBN :
9780819429667
Date de publication :
31 oct. 1998
Langue :
Anglais
Pays d'origine :
USA
A discussion of process, equipment, and materials control in integrated circuit manufacturing. It examines real-time and run-to-run modelling and control in integrated circuit manufacturing, the process of optimization in integrated circuit manufacturing, and more.