In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing ii
Auteur :
Ajuria, Sergio
ISBN :
9780819429681
Date de publication :
30 sept. 1998
Langue :
Anglais
Pays d'origine :
USA
A collection of papers on in-line characterization techniques for performance and yield enhancement in microelectronic manufacturing. They cover: electrical/field emission techniques; optical and em-wave techniques; and surface photovoltage techniques.