Micromachining and microfabrication process technology: no. 4
Auteur :
Smith, James H.
ISBN :
9780819429704
Date de publication :
31 mai 1999
Dimensions :
23,0 cm
Langue :
Anglais
Pays d'origine :
USA
An analysis of micromachining and microfabrication process technology. It covers: direct write; new processes; antistiction and assembly; new technologies; and more.