Materials and device characterization in micromachining
Auteur :
Friedrich, Craig R.
ISBN :
9780819429711
Date de publication :
31 mars 1999
Dimensions :
23,0 cm
Langue :
Anglais
Pays d'origine :
USA
This work contains papers on materials and device characterization in micromachining. Subjects covered include the characterization by scanning probe microscopy and materials characterization such as the tensile properties of LIGA nickel.