Microelectronic structures and mems for optical processing: v. 4
Auteur :
Motamedi, M.Edward
ISBN :
9780819429728
Date de publication :
31 mai 1999
Dimensions :
23,0 cm
Langue :
Anglais
Pays d'origine :
USA
A volume of papers on microelectronic structures and MEMS for optical processing. It explores: micromirrors; micro-optical components and microsensors; optomechanical switches; and modulators and microactuators.