Device and process technologies for mems and microelectronics
Auteur :
Chau, Kevin
ISBN :
9780819434937
Date de publication :
31 oct. 1999
Dimensions :
26,7 x 21,0 cm
Poids :
907 g
Langue :
Anglais
Pays d'origine :
USA
This selection of papers on microelectromechanical systems (MEMS) and microelectronics explores the device and process technologies used in these disciplines.