Design, characterization, and packaging for mems and microelectronics
Auteur :
Courtois, Bernard
ISBN :
9780819434944
Date de publication :
31 oct. 1999
Dimensions :
27,9 x 21,6 x 2,9 cm
Poids :
1247 g
Langue :
Anglais
Pays d'origine :
USA
These papers on microelectromechanical systems (MEMS) and microelectronics cover issues relevant to their design, characterization and packaging.