Contamination-free manufacturing for semiconductors and other precision products
Auteur :
Donovan, Robert P.
Éditeur :
Taylor & Francis Inc
ISBN :
9780824703806
Date de publication :
14 mars 2001
Dimensions :
22,9 x 15,2 cm
Poids :
680 g
Langue :
Anglais
Pays d'origine :
USA
This study recognizes the need for improved control measures in the manufacturing process of highly sensitized semiconductor technology. It provides in-depth and advanced treatment on the origins, procedures and disposal of a variety of contaminants and ensures the proper methods necessary to meet the standards established in the 1997 National Technology Roadmap for Semiconductors (NTRS).