Handbook of silicon semiconductor metrology
Éditeur :
Taylor & Francis Inc
ISBN :
9780824705060
Date de publication :
29 juin 2001
Dimensions :
25,4 x 17,8 cm
Poids :
1580 g
Langue :
Anglais
Pays d'origine :
USA
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, overlay, and dopant dose.