Luminous chemical vapor deposition and interface engineering
Auteur :
Yasuda, Hirotsugu
Éditeur :
Taylor & Francis Inc
ISBN :
9780824757885
Date de publication :
30 nov. 2004
Dimensions :
25,4 x 17,8 cm
Poids :
1610 g
Langue :
Anglais
Pays d'origine :
USA
Covers the development and utilization of LCVD procedures in industrial scale applications. This book describes the difference between glow discharge of an inert gas and that of an organic vapor. It explores the various ways of practicing Luminous Vapor Disposition and Treatment depending on the type and nature of substrates.