Particle control for semiconductor manufacturing
Auteur :
Donovan, R.P.
Éditeur :
Taylor & Francis Inc
ISBN :
9780824782429
Date de publication :
26 janv. 1990
Dimensions :
25,4 x 17,8 cm
Poids :
1050 g
Langue :
Anglais
Pays d'origine :
USA
There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance. In