Ultra-clean technology handbook: volume 1: ultra-pure water
Éditeur :
Taylor & Francis Inc
ISBN :
9780824787530
Date de publication :
29 juin 1993
Dimensions :
24,6 x 17,4 cm
Poids :
1910 g
Langue :
Anglais
Pays d'origine :
USA
Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules. The volume is divided int