Run-to-run control in semiconductor manufacturing
Éditeur :
Taylor & Francis Inc
ISBN :
9780849311789
Date de publication :
30 nov. 2000
Dimensions :
23,4 x 15,6 cm
Poids :
625 g
Langue :
Anglais
Pays d'origine :
USA
Offers analyses of run-to-run (R2R) control. Through manufacturing case studies, this book provides justification for and demonstrates the benefits of run-to-run control, and offers the know-how and direction for incorporating R2R control into readers' manufacturing capabilities.