Radio-frequency capacitive discharges
Auteur :
Raizer, Yuri P. / Shneider, Mikhail N. / Yatsenko, Nikolai A.
Éditeur :
Taylor & Francis Inc
ISBN :
9780849386442
Date de publication :
24 févr. 1995
Dimensions :
22,9 x 15,2 cm
Poids :
750 g
Langue :
Anglais
Pays d'origine :
USA
Describes radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. This work provides a treatment of the physics underlying rf discharges, techniques for generating such discharges, experimental methods and measurement techniques, and research results.