Microlithography: science and technology
Éditeur :
Taylor & Francis Ltd
ISBN :
9781032836737
Date de publication :
24 juin 2024
Dimensions :
25,4 x 17,8 cm
Poids :
1660 g
Langue :
Anglais
Pays d'origine :
Grande Bretagne
Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.