Doping engineering for front-end processing: volume 1070
Éditeur :
Cambridge University Press
ISBN :
9781107408548
Date de publication :
5 juin 2014
Dimensions :
22,9 x 15,2 x 1,8 cm
Poids :
450 g
Format :
Trade paperback (US)
Langue :
Anglais
Pays d'origine :
Grande Bretagne
The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.