Chemistry and lithography
Auteur :
Okoroanyanwu, Uzodinma
Éditeur :
John Wiley & Sons Inc
ISBN :
9781118030028
Date de publication :
8 févr. 2011
Dimensions :
26,2 x 18,3 x 5,3 cm
Poids :
1973 g
Langue :
Anglais
Pays d'origine :
USA
This book will be of interest to all involved in the semiconductor industry. Offering a complete overview of the topic of lithography it will be of interest to practitioners, researchers and students. Chemists, Electrical Engineers, chip designers and manufacturers. Conferences: OSA, ISSCC, ISCS, EMC, ICASSP.