Photonic mems devices: design, fabrication and control
Auteur :
Liu, Ai-Qun
Éditeur :
Taylor & Francis Inc
ISBN :
9781420045680
Date de publication :
4 sept. 2008
Dimensions :
25,4 x 17,8 cm
Poids :
1020 g
Langue :
Anglais
Pays d'origine :
USA
Covers various aspects of engineering innovation, design, modeling, fabrication, control, and experimental implementation of photonic MEMS devices. This text describes different photonic MEMS systems including devices with both component- and system-level photonic integration.