Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
Auteur :
Madou, Marc J.
Éditeur :
Taylor & Francis Inc
ISBN :
9781420055115
Date de publication :
13 juin 2011
Dimensions :
28,0 x 21,0 cm
Poids :
2038 g
Langue :
Anglais
Pays d'origine :
USA
Providing a theoretical understanding of MEMS and NEMS, this book covers various aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, it discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal.