Manufacturing techniques for microfabrication and nanotechnology
Auteur :
Madou, Marc J.
Éditeur :
Taylor & Francis Inc
ISBN :
9781420055191
Date de publication :
13 juin 2011
Dimensions :
28,0 x 21,0 cm
Poids :
2120 g
Langue :
Anglais
Pays d'origine :
USA
Focuses on various trends in industrial lithography and pattern transfer. This book covers photo lithography and next generation lithographies and presents a number of subtractive etching techniques, including dry, chemical, and electrochemical wet. It explains thermal, electro thermal, and mechanical removing techniques.