Mems linear and nonlinear statics and dynamics
Auteur :
Younis, Mohammad I.
Éditeur :
Springer-Verlag New York Inc.
ISBN :
9781441960191
Date de publication :
27 juin 2011
Dimensions :
23,5 x 15,5 cm
Langue :
Anglais
Pays d'origine :
USA
This book presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. In also provides analysis and treatment for the most common static and dynamic phenomena in MEMS.