Compact plasma and focused ion beams
Auteur :
Bhattacharjee, Sudeep
Éditeur :
Taylor & Francis Inc
ISBN :
9781466557888
Date de publication :
12 déc. 2013
Dimensions :
23,4 x 15,6 cm
Poids :
680 g
Langue :
Anglais
Pays d'origine :
USA
This book discusses method to produce compact microwave plasma by overcoming challenges posed by geometrical cutoff of waveguide and density cutoff of plasma alongwith the properties of such compact plasmas. It also brings out a new area of applications where such compact high densities plasmas are utilized for multi-element focused ion beams.