Introductory mems: fabrication and applications
Auteur :
Adams, Thomas M. / Layton, Richard A.
Éditeur :
Springer-Verlag New York Inc.
ISBN :
9781489984210
Date de publication :
7 sept. 2014
Dimensions :
23,5 x 15,5 cm
Langue :
Anglais
Pays d'origine :
USA
Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques.