Optical lithography for advanced semiconductor patterning
Auteur :
Bisschop, Peter De
Éditeur :
SPIE Press
ISBN :
9781510680333
Date de publication :
31 mai 2025
Langue :
Anglais
Pays d'origine :
USA
Optical lithography drives modern microchip fabrication through advanced high-NA extreme-ultraviolet techniques that shape image quality inside resist layers. The text gradually unfolds the complexities of image formation with mathematics, examples, and dedicated case studies for scientifically inclined readers.