Optical scattering: measurement and analysis
Auteur :
Stover, John C.
Éditeur :
SPIE Press
ISBN :
9781510690288
Date de publication :
19 sept. 2025
Langue :
Anglais
Pays d'origine :
USA
Exploring the link between surface roughness and light scatter, the text connects BRDF and fractional scatter to rapid product inspection. It explains how scatterometry detects semiconductor defects and appearance variations in everyday items, offering practical methods for swift quality control.