Environmental, safety, and health issues in ic production: volume 447
Éditeur :
Materials Research Society
ISBN :
9781558993518
Date de publication :
5 juin 1997
Dimensions :
23,7 x 16,0 x 1,5 cm
Poids :
400 g
Langue :
Anglais
Pays d'origine :
USA
This book provides an overview of the available scientific information on environmentally benign IC production. A broad range of topics is addressed including work on resource reduction for chemicals, gases and DI water, reuse or recycling of chemicals, waste treatment strategies, environmentally friendly alternative technologies and analytical technologies for environmental studies.