Handbook of semiconductor manufacturing technology
Éditeur :
Taylor & Francis Inc
ISBN :
9781574446753
Date de publication :
9 juil. 2007
Dimensions :
25,4 x 17,8 cm
Poids :
1800 g
Langue :
Anglais
Pays d'origine :
USA
A guide to the individual processes, equipment, and materials of semiconductor manufacturing technologies. It features chapters on silicon materials, SOI materials and devices, surface preparation, ion implantation, dopant diffusion, in-line metrology, yield modeling, photomask fabrication, failure analysis, and damascene copper electroplating.